000 00421nam a22001577a 4500
005 20220518105426.0
008 100303t xxu||||| |||| 00| 0 eng d
082 _a620.5
_bMAH
100 _aMahalik,N.P
_eEditor
_97567
245 _aMicromanufacturing And Nano Technology
300 _a468p.
653 _aManufacturung And Technology
942 _cBK
260 _aNewYork
_bSpringer
_c2006
_96519
020 _a9788181285058
999 _c190336
_d190336