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| 005 | 20220518105624.0 | ||
| 008 | 100716t xxu||||| |||| 00| 0 eng d | ||
| 082 |
_a621.381 _bBRO |
||
| 100 |
_aBrodie,Ivor _99077 |
||
| 245 | _aThe physics of micro/nano-fabrication | ||
| 300 | _a650p | ||
| 700 |
_aMurray, Julius.J _99081 |
||
| 942 | _cBK | ||
| 260 |
_aNewyork _bPlenum press _c1992 _99078 |
||
| 020 | _a0306441462 | ||
| 999 |
_c190693 _d190693 |
||