000 | 00360nam a22001457a 4500 | ||
---|---|---|---|
005 | 20220518105747.0 | ||
008 | 100728t xxu||||| |||| 00| 0 eng d | ||
082 |
_a670.42 _bOHM |
||
100 |
_aTadhiro, Ohmi _eEditor |
||
245 | _aUltraclean technology handbook | ||
300 | _a928p | ||
942 | _cBK | ||
260 |
_aNewyork _bMarcel Dekker _c1993 |
||
020 | _a0824787536 | ||
999 |
_c190916 _d190916 |