000 00360nam a22001457a 4500
005 20220518105747.0
008 100728t xxu||||| |||| 00| 0 eng d
082 _a670.42
_bOHM
100 _aTadhiro, Ohmi
_eEditor
245 _aUltraclean technology handbook
300 _a928p
942 _cBK
260 _aNewyork
_bMarcel Dekker
_c1993
020 _a0824787536
999 _c190916
_d190916