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| 008 | 100923t xxu||||| |||| 00| 0 eng d | ||
| 082 |
_a621.381 _bLOB |
||
| 100 |
_aLobontiu, Nicolae _910348 |
||
| 245 | _aMechanics of micro electromechanical systems | ||
| 300 | _aviii, 405p | ||
| 700 |
_aEphrahim _910350 |
||
| 942 | _cBK | ||
| 260 |
_aNewyork _bKluwer academic publishers _c2005 _910349 |
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| 020 | _a9788181288493 | ||
| 999 |
_c191113 _d191113 |
||