| 000 | 00405nam a22001577a 4500 | ||
|---|---|---|---|
| 005 | 20220518105907.0 | ||
| 008 | 100923t xxu||||| |||| 00| 0 eng d | ||
| 082 |
_a621.381033 _bZHA |
||
| 100 |
_aZhang, G.Q _910351 |
||
| 245 | _aMechanics of microelectronics | ||
| 300 | _a563p | ||
| 700 |
_aVan Driel, W.D _910352 |
||
| 942 | _cBK | ||
| 260 |
_aNetherlands _bSpringer _c2006 _96353 |
||
| 020 | _a9781402049347 | ||
| 999 |
_c191114 _d191114 |
||