| 000 | 00441nam a22001577a 4500 | ||
|---|---|---|---|
| 999 |
_c219553 _d219553 |
||
| 005 | 20220518130915.0 | ||
| 008 | 201216b ||||| |||| 00| 0 eng d | ||
| 020 | _a9780070487093 | ||
| 082 | _a621.381 | ||
| 100 | _aHsu Tai-Ran | ||
| 245 |
_aMEMS & Microsystems _bDesign and Manufacture |
||
| 260 |
_aNew Delhi _bMcGraw Hill Company |
||
| 300 | _a436p. | ||
| 653 | _aMicrosensors, Scaling, Substraters and Wafers, Photolithography | ||
| 942 | _cBK | ||