| 000 | 00584nam a22001697a 4500 | ||
|---|---|---|---|
| 999 |
_c220907 _d220907 |
||
| 005 | 20220518131406.0 | ||
| 008 | 210302b ||||| |||| 00| 0 eng d | ||
| 020 | _a9780071184212 | ||
| 082 | _a621.3815 | ||
| 100 | _aZant, Van Peter | ||
| 245 |
_aMicrochip Fabrication _bA Practical Guide to Semiconductor Processing |
||
| 250 | _a4th ed | ||
| 260 |
_aBoston _bMcGraw Hill Companies Inc |
||
| 300 | _a632p. | ||
| 653 | _aSemiconductor Industry, Semiconductor Materials, Process Chemicals, Manufacturing Wafers, Wafer Fabrication, Contamination Control, Process Yields | ||
| 942 | _cBK | ||