| 000 | 00537nam a22001697a 4500 | ||
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| 999 |
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| 005 | 20220518131422.0 | ||
| 008 | 210303b ||||| |||| 00| 0 eng d | ||
| 020 | _a9780849336829 | ||
| 082 | _a670.425 | ||
| 245 | _aOptical Inspection of Microsystems | ||
| 250 | _aEdited by Wolfgang Osten | ||
| 260 |
_aBoca Raton _bCRC Press |
||
| 300 | _a503p. | ||
| 490 | _aOptical Science and Engineering | ||
| 653 | _aImage Processing, Optical Profiling Techniques, Grating Interferometry, Measuring MEMS, Laser Doppler Vibrometry | ||
| 942 | _cBK | ||