| 000 | 00601nam a22001817a 4500 | ||
|---|---|---|---|
| 999 |
_c221170 _d221170 |
||
| 005 | 20220518131457.0 | ||
| 008 | 210309b ||||| |||| 00| 0 eng d | ||
| 020 | _a978019513605 | ||
| 082 | _a621.38152 | ||
| 100 | _aCampbell, A Stephen | ||
| 245 | _aThe Science and Engineering of Microelectronic Fabrication | ||
| 250 | _a2nd ed | ||
| 260 |
_aNew York _bOxford University Press |
||
| 300 | _a603p. | ||
| 490 | _aThe Oxford Series in Electrical and Computer Engineering | ||
| 653 | _aSemiconductor Substrates, Unit Process, Thermal Oxidation, Ion Implantation, Optical Lithography | ||
| 942 | _cBK | ||