| 000 | 00415nam a22001577a 4500 | ||
|---|---|---|---|
| 005 | 20220518142758.0 | ||
| 008 | 100515t xxu||||| |||| 00| 0 eng d | ||
| 020 | _a7040176637 | ||
| 082 |
_a620.5 _bCUI |
||
| 100 | _aCui,Zheng | ||
| 245 |
_aMicro-nanofabrication _btechnologies and applications |
||
| 260 |
_aChina _bHigher Education Press _c2005 |
||
| 300 | _ax,304p. | ||
| 653 | _amicro-nanofabrication | ||
| 942 | _cBK | ||
| 999 |
_c222032 _d222032 |
||