| 000 | 00390nam a22001577a 4500 | ||
|---|---|---|---|
| 005 | 20220518142914.0 | ||
| 008 | 100529t xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0852742703 | ||
| 082 |
_a621.381 _bGRO |
||
| 100 | _aGrovenor,C R M | ||
| 245 | _aMicroelectronic materials | ||
| 260 |
_aBristol _bAdam Hilger _c1989 |
||
| 300 | _ax,544p. | ||
| 653 | _amicroelectronic materials | ||
| 942 | _cBK | ||
| 999 |
_c222422 _d222422 |
||