000 00514nam a22001697a 4500
005 20220518143143.0
008 100624t xxu||||| |||| 00| 0 eng d
020 _a0896710947
082 _a006.3
_bMIL
100 _aMiller,Richard K
245 _aArtificial intelligence applications in the semiconductor industry
260 _aGeorgia
_bSEAI Technical Publications
_c1988
300 _a176p.
653 _aartificial intelligence applications - semiconductor industry
700 _aWalker,Terri C
942 _cBK
999 _c223184
_d223184