000 00500nam a22001697a 4500
005 20220518143714.0
008 100916t xxu||||| |||| 00| 0 eng d
020 _a0792301471
082 _a621.381 046
_bLEV
100 _aLevy,R A
_eEditor
245 _aMicroelectronic materials and processes
260 _aLondon
_bKluwer Acadmic Press
_c1986
300 _axiv,981p.
490 _aseries E : Applied sciences
_v164
653 _amicroelectronic materials
_amicroelectronic processes
942 _cREF
999 _c224878
_d224878