000 | 00500nam a22001697a 4500 | ||
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005 | 20220518143714.0 | ||
008 | 100916t xxu||||| |||| 00| 0 eng d | ||
020 | _a0792301471 | ||
082 |
_a621.381 046 _bLEV |
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100 |
_aLevy,R A _eEditor |
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245 | _aMicroelectronic materials and processes | ||
260 |
_aLondon _bKluwer Acadmic Press _c1986 |
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300 | _axiv,981p. | ||
490 |
_aseries E : Applied sciences _v164 |
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653 |
_amicroelectronic materials _amicroelectronic processes |
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942 | _cREF | ||
999 |
_c224878 _d224878 |