| 000 | 00405nam a22001577a 4500 | ||
|---|---|---|---|
| 020 | _a0521322545 | ||
| 082 |
_a621.381 _bIBB |
||
| 100 | _aIbbs, K.G. | ||
| 245 | _aLaser Chemical Processing for Microelectronics | ||
| 260 |
_aCambridge _bCambridge University Press _c1989 |
||
| 300 | _a192 p. | ||
| 650 | _aMicroelectronics | ||
| 650 | _aLaser Chemical Processing | ||
| 700 | _aOsgood, R.M. | ||
| 942 | _cBK | ||
| 999 |
_c246017 _d246017 |
||