| 000 | 00344nam a22001457a 4500 | ||
|---|---|---|---|
| 020 | _a0471452386 | ||
| 082 |
_a537.622 _bMAY |
||
| 100 | _aMay, Gary S. | ||
| 245 | _aFundamentals of Semiconductor Fabrication | ||
| 260 |
_aUS _bJhon Willy _c2004 |
||
| 300 | _a305p. | ||
| 650 | _aSemiconductor Fabrication | ||
| 700 | _aSze,Simon M. | ||
| 942 | _cBK | ||
| 999 |
_c246365 _d246365 |
||