000 00344nam a22001457a 4500
020 _a0471452386
082 _a537.622
_bMAY
100 _aMay, Gary S.
245 _aFundamentals of Semiconductor Fabrication
260 _aUS
_bJhon Willy
_c2004
300 _a305p.
650 _aSemiconductor Fabrication
700 _aSze,Simon M.
942 _cBK
999 _c246365
_d246365