000			00289nam a22001337a 4500
020			_a0864313358
082			_a621.381 _bRAN
100			_aHsu, Tai-Ran
245			_aMEMS packaging
260			_aUK _bInspec _c2004
300			_a275p.
650			_afundamentals of MEMS packaging
942			_cREF
999			_c246388 _d246388