000 00302nam a2200121 4500
020 _a8122405614
082 _a621.381531
_bTAN
100 _aTandon, U S
245 _aPatterning of Material Layers in Submicron Region
260 _aNew Delhi
_bWiley Eastern Limited
_c1993
300 _a183p.
942 _cBK
999 _c247911
_d247911