000 00260nam a2200121 4500
020 _a1584883065
082 _bPEL
100 _aPelesko, John A
245 _aModeling MEMS and NEMS
260 _aLondon
_bCRC Press Company
_c2003
300 _a357p.
942 _cBK
999 _c248896
_d248896