000 00504pam a2200169 a 4500
005 20220519104321.0
008 901010s1991 maua b 001 0 eng
082 0 0 _a621.381/52
_bVOS
245 0 0 _aThin film processes II /
_cedited by John L. Vossen, Werner Kern.
300 _axiii, 866 p. :
_bill. ;
_c24 cm.
653 _aThin films.
700 1 _aVossen, John L., ed.
_93032
700 1 _aKern, Werner., ed.
_93033
942 _cBK
260 _aBoston :
_bAcademic Press,
_cc1991.
020 _a0127282513
999 _c264490
_d264490