000 00786cam a2200193 a 4500
005 20220519104544.0
008 860722s1986 paua b 101 0 eng
082 0 0 _a621.3815/2
_bCHI
245 0 0 _aSemiconductor-on-insulator and thin film transistor technology :
_bsymposium held December 3-6, 1985, Boston, Massachusetts, U.S.A. /
_ceditors, A. Chiang, M.W. Geis, L. Pfeiffer.
300 _axvii, 474 p. :
_bill. ;
_c24 cm.
490 _aMaterials research society symposia proceedings;
_vv. 53
653 _aSemiconductors
_aThin film devices
_aIntegrated circuits
700 1 _aChiang, A., ed.
_94065
700 1 _aGeis, M. W., ed.
_94066
700 1 _aPfeiffer, L., ed.
_94067
942 _cBK
260 _aPittsburgh, Pa. :
_bMaterials Research Society,
_cc1986.
020 _a0931837189
999 _c265190
_d265190