| 000 | 00989pam a2200217 a 4500 | ||
|---|---|---|---|
| 005 | 20220519104627.0 | ||
| 008 | 830408s1983 nyua b 101 0 eng | ||
| 082 | 0 | 0 |
_a621.3815/2 _bOSG |
| 245 | 0 | 0 |
_aLaser diagnostics and photochemical processing for semiconductor devices : _bsymposium held November 1982 in Boston, Massachusetts, U.S.A. / _ceditors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg. |
| 300 |
_axiii, 298 p. : _bill. ; _c24 cm. |
||
| 490 |
_aMaterial research society symposia proceedings; _vv. 17 |
||
| 653 |
_aLasers--Industrial applications--Congresses. _aSemiconductors--Congresses. |
||
| 700 | 1 |
_aOsgood, R. M., ed. _94381 |
|
| 700 | 1 |
_aBrueck, S. R. J., ed. _94382 |
|
| 700 | 1 |
_aSchlossberg, H. R., ed. _94383 |
|
| 710 | 1 |
_aUnited States. _bAir Force. _bOffice of Scientific Research. _94384 |
|
| 942 | _cBK | ||
| 260 |
_aNew York : _bNorth-Holland, _cc1983. |
||
| 500 | _a"Sponsored by the Air Force Office of Scientific Research"--T.p. verso. | ||
| 020 | _a0444007822 | ||
| 999 |
_c265404 _d265404 |
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