| 000 | 00564pam a2200169 a 4500 | ||
|---|---|---|---|
| 005 | 20220519104956.0 | ||
| 008 | 820513s1982 nyua b 101 0 eng | ||
| 082 | 0 | 0 |
_a621.3815/2 _bPOA |
| 245 | 0 | 0 |
_aLaser annealing of semiconductors / _cedited by J.M. Poate, James W. Mayer. |
| 300 |
_axi, 564 p. _bill. ; _c24 cm. |
||
| 653 |
_aSemiconductor industry--Laser use in--Congresses. _aSemiconductors |
||
| 700 | 1 |
_aPoate, J. M., ed. _95840 |
|
| 700 | 1 |
_aMayer, James W., ed. _95841 |
|
| 942 | _cBK | ||
| 260 |
_aNew York : _bAcademic Press, _c1982. |
||
| 020 | _a0125588208 | ||
| 999 |
_c266453 _d266453 |
||