| 000 | 00921cam a2200193 a 4500 | ||
|---|---|---|---|
| 005 | 20220519104956.0 | ||
| 008 | 940902s1995 maua b 001 0 eng | ||
| 082 | 0 | 0 |
_a621.3815/2 _bRIM |
| 100 | 1 |
_aRimini, Emanuele _97997 |
|
| 245 | 1 | 0 |
_aIon implantation : _bbasics to device fabrication / _cby Emanuele Rimini. |
| 300 |
_axii, 393 p. : _bill. ; _c25 cm. |
||
| 490 | 1 |
_aThe Kluwer international series in engineering and computer science ; _vSECS 293. _aElectronic materials, science and technology |
|
| 653 |
_aIon implantation _aSemiconductor doping _aSemiconductors--Design and construction |
||
| 942 | _cBK | ||
| 260 |
_aBoston : _bKluwer Academic Publishers, _cc1995. |
||
| 020 | _a0792395204 | ||
| 830 | 0 |
_aKluwer international series in engineering and computer science ; _vSECS 293. _95844 |
|
| 830 | 0 |
_aKluwer international series in engineering and computer science. _pElectronic materials, science and technology. _95845 |
|
| 999 |
_c266455 _d266455 |
||