| 000 | 00517pam a2200181 a 4500 | ||
|---|---|---|---|
| 005 | 20220519105222.0 | ||
| 008 | 921022s1993 enka b 001 0 eng | ||
| 082 | 0 | 0 |
_a533/.5 _bDEL |
| 100 | 1 |
_aDelchar, T. A. _96797 |
|
| 245 | 1 | 0 |
_aVacuum physics and techniques / _cT.A. Delchar. |
| 250 | _a1st ed. | ||
| 300 |
_aviii, 253 p. : _bill. ; _c22 cm. |
||
| 490 | _aPhysics and its applications | ||
| 653 |
_aVacuum _aVacuum technology |
||
| 942 | _cBK | ||
| 260 |
_aLondon ; _bChapman & Hall, _c1993. |
||
| 020 | _a0412465906 | ||
| 999 |
_c267169 _d267169 |
||