000 00513nam a22001577a 4500
005 20220519105810.0
008 110704t xxu||||| |||| 00| 0 eng d
082 _aPH. D
100 _aPaulraj, M.
_99035
245 _aNon-destructive evaluation of ion implanted semiconductor thin films using photothermal deflection spectroscopy
300 _aPh. D
653 _aThin film
700 _aVijayakumar, K. P (Guide)
_98969
942 _cREF
260 _aCochin:
_bCochin University of Science and Techonology,
_c2004.
999 _c268275
_d268275