| 000 | 00638cam a2200169 a 4500 | ||
|---|---|---|---|
| 005 | 20220519110426.0 | ||
| 008 | 881012s1989 nyua b 001 0 eng | ||
| 082 | 0 | 0 |
_a678.06:62 _bHTO |
| 100 |
_aHtoo, Maung S. _eAuthor _9828 |
||
| 245 | 0 | 0 |
_aMicroelectronic polymers _cMaung S. Htoo. |
| 300 |
_aix, 407 p. : _bill. ; _c24 cm. |
||
| 653 |
_aPolymers _aMicrolithography--Materials _aMicroelectronics--Materials. _aPolymers-application _aMicroelectronics-materials _aPolymers-application in microelectronics _aLithographic polymers |
||
| 700 | 1 |
_aHtoo, Maung S., _9827 |
|
| 942 | _cBK | ||
| 260 |
_aNew York _bM. Dekker _c1989. |
||
| 020 | _a0824779908 | ||
| 999 |
_c269343 _d269343 |
||