| 000 | 00586nam a22001697a 4500 | ||
|---|---|---|---|
| 005 | 20151026130321.0 | ||
| 008 | 091016t xxu||||| |||| 00| 0 eng d | ||
| 020 | _a3-540-23782-8 | ||
| 080 | _a621.3.049.77 | ||
| 100 |
_aHierlemann, Andreas _97104 |
||
| 245 | _aIntegrated chemical microsensor systems in CMOS technology | ||
| 260 |
_aNew York _bSpringer _c2005 _96525 |
||
| 300 | _ax, 229p. | ||
| 500 | _aMicrotechnology and MEMS | ||
| 653 |
_aMicrosenor systems - Chemical _aChemical microsensor system _aCMOS _aMetal oxide semiconductor _aMicroelectromechanical systems |
||
| 942 | _cBK | ||
| 999 |
_c3074 _d3074 |
||