| 000 | 00648nam a22001697a 4500 | ||
|---|---|---|---|
| 005 | 20151026130326.0 | ||
| 008 | 091019t xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0-8194-5166-5 | ||
| 080 |
_a621.3.049.77 _bSCH |
||
| 100 |
_aSchellenberg, F.M. [ed.] _eed. by _97461 |
||
| 245 | _aSelected papers on resolution enhancement techniques in optical lithography-Bellingham | ||
| 260 |
_aWashington _bSPIE Press _c2004 _97462 |
||
| 300 | _axx, 875p. | ||
| 490 | _a(SPIE milestone series v.178) | ||
| 653 |
_aIntegrated circuits-design and construction _aMicrolithography _aPhotolithography _asemiconductors-Etching _aOptical lithography |
||
| 942 | _cBK | ||
| 999 |
_c3254 _d3254 |
||