| 000 | 00398 a2200133 4500 | ||
|---|---|---|---|
| 020 | _a0-07-239391-2 | ||
| 080 |
_a621.38.049.77 _bHSU |
||
| 100 |
_aHsu, Tai-Ran _95242 |
||
| 245 |
_aMEMS and microsystems _bDesign and manufacture |
||
| 260 |
_aNew Delhi _bTata Mc Graw Hill _c2002 |
||
| 300 | _a436p. | ||
| 650 |
_a621.38.049.77 _xMicroelectronics _xMicrosystems design, packaging _95243 |
||
| 942 |
_cBK _2ddc |
||
| 999 |
_c331327 _d331327 |
||