| 000 | 00652nam a22001577a 4500 | ||
|---|---|---|---|
| 005 | 20151026130328.0 | ||
| 008 | 091020t xxu||||| |||| 00| 0 eng d | ||
| 020 | _a3-527-40502-x | ||
| 080 |
_a621-791 _bWIL |
||
| 100 |
_aWilkening, G. _97579 |
||
| 245 |
_aNanoscale calibration standards and methods: _bdimeensional and related measurements in the micro-and nanometer range |
||
| 260 |
_aGermany _bWiley VCH _c2005 _97580 |
||
| 300 | _axxii, 519p. | ||
| 653 |
_aNanometrology _aNanomeasuring _aNanoscale _aNanostructed materials - Measurement _aMicrostructure - Measurement - Congress _aStereology - Congresses _aCalibration - Nanometerology |
||
| 942 | _cREF | ||
| 999 |
_c3321 _d3321 |
||