000 00447 a2200145 4500
020 _a00471580058
080 _a621.381
_bGHA
100 _aGandhi, Sorab K
245 _aVLSI fabrication principles
_bsilicon and arsenide
250 _a2nd ed.
260 _aNew York
_bJohn Wiley
_c1994
300 _axxiv, 834p.
650 _a621.381.94:6
_xIntegrated circuits - very large scale integration
_xSilicon
_xGallium arsenide
942 _cCR
_k621.381 GHA
999 _c349185
_d349185