000			00697nam a22001937a 4500
005			20151026130336.0
008			091022t xxu||||| |||| 00| 0 eng d
080			_a621(035) _bGAD.1
100			_aGad-el-Hak, Muhamed [ed.] _eed. by _97939
245			_aMEMS: _bintroduction and fundamentals
300			_avarious pagination _b3v.
490			_a(Mechanical Engineering)
653			_aMicroelectronics _aNanotechnology _aMicroelectromechanical systmes _aMEMs-fundamentals
942			_cREF
260			_aBoca Raton _bCRC Taylor & Francis _c2006 _96966
500			_aV.1: Introduction and fundamentals, V.2: Design and fabrication, V.3: Applications
250			_a2nd ed.
020			_a0-8493-9137-7
999			_c3513 _d3513