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| 020 | _a0-7503-0583-5 | ||
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| 040 | _aAdlib | ||
| 082 | _a621-791 | ||
| 245 | _aHandbook of surface and nanometrology | ||
| 250 | _a | ||
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_aBristol _bInstitute of physics publishing _c2003 |
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| 300 |
_axx, 1150p. _c |
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_aWhitehouse, David J. _e |
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_ametrology _aSurface metrology _aNanometrology |
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