| 000 | 00650nam a2200241 a 4500 | ||
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| 001 | adlib96000001 | ||
| 003 | ViArRB | ||
| 005 | 20151026132218.0 | ||
| 008 | 960221s1955 dcuabcdjdbkoqu001 0deng d | ||
| 020 | _a0-07-048709-x | ||
| 022 | _a | ||
| 040 | _aAdlib | ||
| 082 | _a621.38 | ||
| 245 | _aMEMS and microsystems: design and manufacture | ||
| 250 | _a | ||
| 260 |
_aNew Delhi _bTata McGraw- Hill _c2005 |
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| 300 |
_axii,436p. _c |
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| 500 | _a | ||
| 100 |
_aHsu, Tai-Ran _e |
||
| 700 |
_a _a |
||
| 942 | _cBK | ||
| 653 |
_aMicroelectronics _aElectronics _aSemiconductors _aMicroelectromechanical systems _aMEMS _aMicroelectronic packaging |
||
| 999 |
_c43928 _d43928 |
||