000 | 00658nam a2200241 a 4500 | ||
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001 | adlib96000001 | ||
003 | ViArRB | ||
005 | 20151026132241.0 | ||
008 | 960221s1955 dcuabcdjdbkoqu001 0deng d | ||
020 | _a1584883065 | ||
022 | _a | ||
040 | _aAdlib | ||
082 | _a681.382 | ||
245 | _aModeling MEMS and NEMS | ||
250 | _a | ||
260 |
_aBoca Raton _bChapman & Hall /CRC _c2007 |
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300 |
_axxiii, 357p _c |
||
500 | _a | ||
100 |
_aPelesko, John A. _e |
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700 |
_aBernstein, David H. _a |
||
942 | _cBK | ||
653 |
_aMEMS- Mathematical models _aNEMS- Mathematical models _aMicroelectromechanical systems _aNanoelectromechanical systems |
||
999 |
_c44694 _d44694 |