000 00658nam a2200241 a 4500
001 adlib96000001
003 ViArRB
005 20151026132241.0
008 960221s1955 dcuabcdjdbkoqu001 0deng d
020 _a1584883065
022 _a
040 _aAdlib
082 _a681.382
245 _aModeling MEMS and NEMS
250 _a
260 _aBoca Raton
_bChapman & Hall /CRC
_c2007
300 _axxiii, 357p
_c
500 _a
100 _aPelesko, John A.
_e
700 _aBernstein, David H.
_a
942 _cBK
653 _aMEMS- Mathematical models
_aNEMS- Mathematical models
_aMicroelectromechanical systems
_aNanoelectromechanical systems
999 _c44694
_d44694