000 00620nam a2200241 a 4500
001 adlib96000001
003 ViArRB
005 20151026132254.0
008 960221s1955 dcuabcdjdbkoqu001 0deng d
020 _a9781402059483
022 _a
040 _aAdlib
082 _a67.02-181.4
245 _aMicromanufacturing: international research and development
250 _a
260 _aDordrecht
_bSpringer
_c2007
300 _axxxix, 362p
_c
500 _a
100 _aEhmann, Kornel F.
_e
700 _a...[et al.]
_a
942 _cBK
653 _aMicrofabrication
_aMicromachining
_aMicromanufacturing
999 _c45146
_d45146