| 000 | 00433nam a22001577a 4500 | ||
|---|---|---|---|
| 005 | 20151026130412.0 | ||
| 008 | 091204t xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0-8247-2431-3 | ||
| 080 |
_a621.7/.9 _bJAC |
||
| 100 |
_aJackson, Mark J. _99819 |
||
| 245 | _aMicrofabrication and nanomanufacturing | ||
| 260 |
_aBoca Raton _bCRC Press _c2006 _96488 |
||
| 300 | _a401p. | ||
| 653 |
_aNanotechnology _aNanomanufacturing |
||
| 942 | _cBK | ||
| 999 |
_c4563 _d4563 |
||