000 00674nam a2200241 a 4500
001 adlib96000001
003 ViArRB
005 20151026132400.0
008 960221s1955 dcuabcdjdbkoqu001 0deng d
020 _a9781860948626
022 _a
040 _aAdlib
082 _a621.382
245 _aAdvances in multiphysics simulation and experimental testing of Mems
250 _a
260 _aLondon
_bImperial College Press
_c2008
300 _axii, 489p
_c
500 _a
100 _aFrangi, Attilio
_eed.by
700 _a
_a
942 _cBK
653 _aMicroelectromechanical systems - simulations methods
_aMicroelectromechanical systems - Testing
_aMEMS
999 _c47541
_d47541