| 000 | 00670nam a2200241 a 4500 | ||
|---|---|---|---|
| 001 | adlib96000001 | ||
| 003 | ViArRB | ||
| 005 | 20151026132426.0 | ||
| 008 | 960221s1955 dcuabcdjdbkoqu001 0deng d | ||
| 020 | _a9780815515548 | ||
| 022 | _a | ||
| 040 | _aAdlib | ||
| 082 | _a621.315.617 | ||
| 245 | _aHandbook of silicon wafer cleaning technology | ||
| 250 | _a2nd | ||
| 260 |
_aNorwich _bWilliam Andrew _c2008 |
||
| 300 |
_axxvi, 718p _c |
||
| 500 | _a | ||
| 100 |
_aReinhardt, Karen. A. _eed.by |
||
| 700 |
_aKern, Werner _a |
||
| 942 | _cBK | ||
| 653 |
_aSilcon-on-insulator technology _aSilicon wafer _aDry cleaning _aWet chemical processes _aPlasma stripping |
||
| 999 |
_c48523 _d48523 |
||