000 00670nam a2200241 a 4500
001 adlib96000001
003 ViArRB
005 20151026132432.0
008 960221s1955 dcuabcdjdbkoqu001 0deng d
020 _a9783527406333
022 _a
040 _aAdlib
082 _a620.1.03
245 _aPlasma-Aided nanofabrication:from plasma sources to nanoassembly
250 _a
260 _aWeinhein
_bWiley - VCH
_c2007.
300 _axiii,300p.
_c
500 _a
100 _aOstrikov, Kostya(Ken)
_e
700 _aXu, Shuyan
_a
942 _cBK
653 _aNanostructured materials
_aPlasma engineering
_aLow temparature plasmas
_aManufactureing processes
999 _c48690
_d48690