| 000 | 00638nam a2200241 a 4500 | ||
|---|---|---|---|
| 001 | adlib96000001 | ||
| 003 | ViArRB | ||
| 005 | 20151026132432.0 | ||
| 008 | 960221s1955 dcuabcdjdbkoqu001 0deng d | ||
| 020 | _a9780470016992 | ||
| 022 | _a | ||
| 040 | _aAdlib | ||
| 082 | _a621.382 | ||
| 245 | _aScaling issues and design of MEMS | ||
| 250 | _a | ||
| 260 |
_aChichester _bJohn Wiley and Sons _c2007 |
||
| 300 |
_axiii,229p. _c |
||
| 500 | _a | ||
| 100 |
_aBaglio, Salvatore _e |
||
| 700 |
_aCastorina, Saslvatore _aSavalli, Nicolo |
||
| 942 | _cBK | ||
| 653 |
_aMicroelectromechanical systems - design and construction _aMEMS |
||
| 999 |
_c48691 _d48691 |
||