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| 003 | ViArRB | ||
| 005 | 20151026132432.0 | ||
| 008 | 960221s1955 dcuabcdjdbkoqu001 0deng d | ||
| 020 | _a9783527316984 | ||
| 022 | _a | ||
| 040 | _aAdlib | ||
| 082 | _a621.382 | ||
| 245 | _aLIGA and its applications | ||
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_aWeinheim _bWiley-VCH _c2009 |
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| 300 |
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| 500 | _a | ||
| 100 |
_aSaile,Volker ...[et.al] _eed.by |
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_a _a |
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| 942 | _cREF | ||
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_aMicroelectromechanical systems _aMicrotechnology |
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_c48696 _d48696 |
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