000 00581nam a2200241 a 4500
001 adlib96000001
003 ViArRB
005 20151026132856.0
008 960221s1955 dcuabcdjdbkoqu001 0deng d
020 _a
022 _a
040 _aAdlib
082 _a621.315.59
245 _aVLSI fabrication principles: silicon and gallium arsenide
250 _a2nd ed
260 _aNew York
_bJohn Wiley
_c1994
300 _axxiv, 834p.
_c
500 _a
100 _aGhandhi, Sorab K
_e
700 _a
_a
942 _cBK
653 _asilicon arsenide
_agallium arsenide
999 _c58209
_d58209