| 000 | 00466 a2200169 4500 | ||
|---|---|---|---|
| 005 | 20151026133125.0 | ||
| 008 | 120724t xxu||||| |||| 00| 0 eng d | ||
| 080 |
_a621.315.612 _bDOR |
||
| 100 |
_aDorey, Robert _920990 |
||
| 245 | _aCeramic thick films for MEMS and microdevices | ||
| 300 | _a191p. | ||
| 653 | _aPiezoelectric devices | ||
| 653 | _aCeramic thick films | ||
| 942 | _cBK | ||
| 260 |
_bElsevier _c2012 _aAmsterdam _920863 |
||
| 020 | _a9781437778175 | ||
| 999 |
_c63624 _d63624 |
||