| 000 | 00531 a2200181 4500 | ||
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| 005 | 20151026133218.0 | ||
| 008 | 130211t xxu||||| |||| 00| 0 eng d | ||
| 080 |
_a621.38:621.319 _bLEE |
||
| 100 |
_aLee, Ki Bang _922846 |
||
| 245 | _aPrinciples of microelectromechanical systems | ||
| 300 | _axii, 667p. | ||
| 653 | _aMicroelectromechanical systems | ||
| 653 | _aElectrostatic actuators | ||
| 653 | _aElectromagnetic actuators | ||
| 942 | _cBK | ||
| 260 |
_bJohn Wiley _c2011 _aNew Jersey _919624 |
||
| 020 | _a9780470466346 | ||
| 999 |
_c65399 _d65399 |
||