000 | 00493 a2200181 4500 | ||
---|---|---|---|
005 | 20151026133235.0 | ||
008 | 131106b xxu||||| |||| 00| 0 eng d | ||
020 | _a9780080964546 | ||
080 |
_a681.2:620.3 _bLEA |
||
100 | _a Leach, Richard K | ||
245 | _aFundamental principles of engineering nanometrology | ||
260 |
_bElsevier _c2010 _aAmsterdam |
||
300 | _axxvi, 321p. | ||
653 | _aNanometrology | ||
653 | _aNanotechnology | ||
653 | _aCoordinate metrology | ||
942 | _cBK | ||
999 |
_c66068 _d66068 |