| 000 | 00533 a2200181 4500 | ||
|---|---|---|---|
| 005 | 20151026133302.0 | ||
| 008 | 140226b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780521764834 | ||
| 080 |
_a621.382 _bJON |
||
| 100 | _aJones, Thomas B | ||
| 245 |
_aElectromechanics and MEMS _cThomas B Jones and Nenad G Nenadic |
||
| 260 |
_c2013 _bCambridge University Press _aCambridge |
||
| 300 | _axx, 559p. | ||
| 653 | _aMicroelectromechanical system (MEMS) | ||
| 653 | _aElectromechanics | ||
| 700 | _aNemadic, Nemad G | ||
| 942 | _cBK | ||
| 999 |
_c67219 _d67219 |
||