| 000 | 00622 a2200205 4500 | ||
|---|---|---|---|
| 005 | 20151026133352.0 | ||
| 008 | 150131b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9781482222050 | ||
| 080 |
_a533.922 _bMAK |
||
| 100 | _aMakabe, Toshiaki | ||
| 245 |
_aPlasma electronics _bapplications in microelectronic device fabrication _cToshiaki Makabe and Zoran Lj Petrovic |
||
| 250 | _a2nd ed. | ||
| 260 |
_c2015 _bCRC Press _aNew York |
||
| 300 | _axxxv, 376p. | ||
| 653 | _aPlasma engineering | ||
| 653 | _aLow temperature plasma | ||
| 653 | _aPlasma processing | ||
| 700 | _aPetrovic, Zoran Lj; ed. by | ||
| 942 | _cBK | ||
| 999 |
_c69370 _d69370 |
||