| 000 | 00581 a2200205 4500 | ||
|---|---|---|---|
| 005 | 20151026133429.0 | ||
| 008 | 150518b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9788132219125 | ||
| 080 |
_a621.382 _bVIN |
||
| 100 | _aVinoy, K.J....[et.al.] | ||
| 245 |
_aMicro and smart devices and systems _cby K.J. Vinoy......[et.al.] |
||
| 260 |
_bSpringer _aNew Delhi _c2014 |
||
| 300 | _axxvi, 508p. | ||
| 490 | _aSpringer tracts in mechanical engineering | ||
| 653 | _aMicrosensors | ||
| 653 | _aMicroactuators | ||
| 653 | _aMicroelectronics | ||
| 653 | _aMEMS | ||
| 942 | _cBK | ||
| 999 |
_c70958 _d70958 |
||