Vacuum technology, thin films, and sputtering :
Stuart, R. V.
Vacuum technology, thin films, and sputtering : an introduction / R.V. Stuart. - New York : Academic Press, 1983. - viii, 151 p. : ill. ; 24 cm.
0126747806
Vacuum technology. Thin films. Cathode sputtering (Plating process)
621.5/5 / STU
Vacuum technology, thin films, and sputtering : an introduction / R.V. Stuart. - New York : Academic Press, 1983. - viii, 151 p. : ill. ; 24 cm.
0126747806
Vacuum technology. Thin films. Cathode sputtering (Plating process)
621.5/5 / STU